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A C I N E W S L E T T E R |
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GALA KIT for AMAT
ENDURA®
(PIK II)
PRECLEAN Chamber Design Improvement
Current Problems:
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Cleaning and refurbishment deteriorate the quartz material and the original roughness, which can become the source of particles.
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Metal end-effecter often scratches the backside of a wafer and causes particles.
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When a robot is misaligned, end-effecter could hit the wall / gate door, which bends the end-effecter and could severely damage the robot arm itself.
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Silicon pins often could become a source of particles. |
Contact Sales ... Click Here |
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Applied Ceramics’ solution is a replacement of quartz and metal parts, that result in:
All ceramic components prolong the production cycle between cleaning 2 to 4 times.
You profit from our experience and abilities. |
Endura is a registered trademark of Applied Materials, Corp.
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Newsletter #100
